Note :
The vacuum plasma cleaning machine is plasma processing the pen tongue of ABS material.
Name
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Vacuum Plasma system
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Model
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DSX- VPD-8L-S
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Technical Parameter
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Remarks
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1
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Control system
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PLC+HMI
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Mitsubishi
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2
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Vacuum Pump
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Rotary vacuum pump
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TVP
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3
|
Plasma generator
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RF Power 13.56MZH 1000W + Matching
network
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KVMEN
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4
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Vacuum Guage
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Pirani resistance vacuum gauge
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Ulvac
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5
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Mass Flow Control
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MFC control system
|
ETON
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6
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Gas control system
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2 Channel solenoid valve control
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SMC
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7
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Vacuum output control
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Hi-level vacuum pneumatic flapper valve GDW-KF40
|
ISO standard
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8
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Vacuum breaking control
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Hi-level vacuum pneumatic flapper valve
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ISO standard
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9
|
Electrode Layer
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8 Layers of horizontal electrode plate(Option)
|
AL6061-L
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10
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Effective treatment area
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300mm(D)*400mm(W)
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Option
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11
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Process gas channel
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2 channels process gases option: AR O2
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Option
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12
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Chamber Size
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450mm(W)*450mm(D)*400mm(H)
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AL-6061-L
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13
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Layout Size
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995mm(W)*1085mm(D)*1750mm(H)
|
Technical Parameters of Plasma Cleaner Machine :
1. Power supply : 3P : 380VAC 50/60Hz
2. Power KW : 5.7KW
3. Working vacuum point : 10-100Pa
4. Vacuum output time : ≤100s
5. Vacuum breaking time : ≤30s
6. RF Power KW : 0-1000W
7. Weight : ≤500KG
8. MFC Range : 0-200sccm
9. Mode of operation : Fully auto operation system, One-key starting
What are the Preparation before installating Plasma Cleaner ?
1. Compressed air ≥0.5mpa,ø6mm PU pipe;
2. Process gas: AR & O2 (≥99.999%) 0.15~0.25mpa,ø6mm PU pipe;
3. Exhaust : ø50mm connector
4. Main Power supply : ≥ 4mm2 5.7KW
What is the Plasma Treatment ?
1. Vacuum chamber
Made of aviation grade aluminum , Fully auto welding to makesure no leaking, optimizing the design of eight-layer electric plates and making rational use of space
2. RF power
A safe and reliable radio frequency supply(13.56MHZ) provides guarantee for the Generation of high-level neutrons;
3. Vacuum pump
The design of fast silent vacuum pump system can achieve a vacuum level of less Than 10pa, Thus ensuring the required pressure of the equipment.
4. Control system
PLC+Touch panel auto control system design, Convenient for customers to use And operate
5. MFC control system
Professional closed-loop flow control system ensures the accuracy of process gas And the stability of contour effect.
How does the Vacuum Plasma Cleaning Work ?
1. Vcauum extraction
2. Adding process gas : adding the gases with accurate flow rate into the Vacuum chamber and uniformly distributing.
3. RF power supply provides energy to ionize the process gas in the vacuum chamber to form plasma.
4. Product treatment : According the set time in program to starting plasma processing.
5. Vacuum breaking: After finished the set time in program, Open the chamber door and take out the products in chamber.
ABS material pen tongue hydrophilic special vacuum plasma cleaning machine application field :
Note :
The left pen tongue is treated by vacuum plasma, while the right pen tongue is not treated by plasma. You can see that the plasma-treated pen tongue on the left is already hydrophilic and can absorb water well. The right side of the pen tongue without vacuum plasma cleaning, water quickly dripping, not hydrophilic.
The Applications in Plasma Cleaner :
1. Plasma Treatment In the pre-fabrication process of integrated circuits or MEMS, the wafer surface is coated with photoresist, and then photoresist and developed.However, photoresist is only a medium for circular transformation. When the photoresist machine forms nano-graphics on the photoresist, the next step of growth or etching process is needed, and then the photoresist needs to be removed by some method.Plasma degumming machine can achieve this function.It USES radio frequency or microwave mode to produce plasma, at the same time through oxygen or other gases, plasma and photoresist reaction, forming gas is pumped away by vacuum pump.
2. In the production process of microelectronic packaging, due to fingermarks, flux, various cross-contamination and natural oxidation, the surface of devices and materials will form a variety of contamination, including organic matter, epoxy resin, solder, metal salt, etc.These fouling will obviously affect the packaging production process in the relevant process quality.Using plasma cleaning can easily remove these molecules formed in the production process of levels of pollution, ensure the workpiece surface precision contact between atoms with the attached material, effectively improve the bonding strength, lead to improve chip bonding quality, reduce packaging leak rate, improve the performance of components, yield, and reliability.
3. LED point before the silver glue: silver substrate pollutants can cause gum balls, does not favor the chip paste, and easy to cause the chip manual sting a little damage, plasma cleaning can make work surface roughness and hydrophilicity is greatly increased, for silver glue paste tile and chip, and can greatly save the use of silver sol, reduce the cost.
Before LED bonding: improve bonding strength and tensile uniformity of bonding lead.The pressure of the bonding cutter head can be low (in case of pollutants, the bonding head needs to increase the force to penetrate pollutants), and in some cases, the bonding temperature can also be reduced, thus increasing the output and reducing the cost.
Before LED packaging: in the epoxy adhesive injection process of LED, pollutants will lead to high bubble formation, which will lead to low product quality and service life. After plasma cleaning, the chip and substrate will be more precise and colloid combination, the formation of bubbles will be greatly reduced, and the heat dissipation rate and light emission rate will be significantly improved.
4. Plasma Cleaning System for Petri dish/enzyme plate: improve adhesion of cells and biomaterials to clinical diagnostic platforms. Most platforms for cell culture media and other clinical diagnosis are made of synthetic polymer materials.These materials have good inertia, mechanical stability and low manufacturing cost, but at the same time their surface properties have inherent limitations.In particular, they do not provide enough junctions for cells and biologically active molecules to bind effectively to their surfaces.Strong, uniformly distributed junctions are critical for immobilization of biomaterials and in vitro cell culture.For cell propagation and biomolecular adsorption, the surface of synthetic polymer platforms must be modified to improve their performance.It is very reliable and environmentally friendly to use low-temperature plasma technology to solve the adhesion problem of biomaterials to the medium.
5. Plasma Cleaning System Microfluidic devices: microfluidic devices require hydrophilic surfaces so that analytes can flow continuously and gently through microchannels to the detection and processing locations on these devices.This flow can be achieved by various suction, electric osmosis, heat, mechanical and other methods.Microfluidic devices are made of hydrophobic polymeric materials (acrylic acid, polystyrene, polydimethylsiloxane (PDMS)).One of the major problems with these materials due to their hydrophobicity is that crowded bubbles in the microchannel inhibit the flow of the liquid.Plasma treatment oxidizes the surfaces of microchannels, making them hydrophilic and preventing bubbles from forming.The surface charge density during electric pumping also affects the flow rate.Plasma can effectively promote the electroosmotic flow on the surface of charge meter, which is another advantage of plasma treatment of microfluidic devices.
6.Plasma Cleaning System Camera module: in the production process of COMS camera, lens cleaning, circuit welding, packaging and other procedures are involved.The presence of organic pollutants or oxidation layer on the surface of products in these processes will have an impact on the performance and reliability of products. The addition of plasma cleaning process in these processes can remove pollutants from the surface of products, improve the welding and packaging strength, and thus obtain more reliable products.
7. Plasma Cleaning System for Stealth aircraft coating pretreatment, modern advanced aircraft stealth is an indispensable function.However, in order to achieve the stealth effect, the aircraft surface must be coated with a layer of special material that can absorb radar waves. Plasma is used to pretreat the surface of the aircraft shell before the coating, so that the coating binding force is better and it is not easy to fall off, which increases the flight time and reduces the maintenance cost.
8. Plasma Cleaning System for Hole slag removal: hole slag removal is the current plasma technology in the PCB field more applications of the process.Hole inside glue slag refers to in the circuit board drilling process (machine drilling and laser drilling) due to high temperature caused by molecular material melting in the hole wall metal surface glue slag, rather than mechanical drilling processing caused by rough edges, burrs, must be removed before gold plating.This gel residue is also dominated by carbon oxides, which can easily react with ions or free radicals in plasma to generate volatile hydrocarbon oxides, which are finally taken out by the vacuum system.
9. Plasma is used to clean the surface of the circuit board (FPC/PCB) before it is shipped.Generally, downstream customers of PCB will inspect the products with supplied materials, such as Wire Bonding Test, Wire Pull Test, etc., some contamination often leads to failure of the Test when the surface is not cleaned.To avoid the above problems, surface plasma cleaning before shipment has become a standard process.
10. Application in plastic industry
Plasma technology is used for surface treatment of these materials. Under the bombardment of high-speed and high-energy plasma, the structural surface of these materials can be maximized to form an active layer on the surface of the material, so that plastics and plastics can be printed, bonded, coated and other operations.The application of plasma technology on rubber surface treatment, simple operation, no harmful substances before and after treatment, treatment effect is good, high efficiency, low operation cost.
11. Plasma Cleaning System for Car ignition coil
Plasma treatment of ignition coil skeleton can not only remove volatile oil from the surface, but also greatly improve the surface activity of the skeleton.It can not only improve the bonding strength of the skeleton and epoxy resin, avoid bubbles, but also improve the welding strength of enameled wire and skeleton contact after winding.In this way, the performance of ignition coil in the production process has been significantly improved, and the reliability and service life have been improved.
12. Plasma Cleaner for Engine oil seal
PTFE material performance, high temperature resistance, corrosion resistance, non-stick, lubrication, excellent dielectric properties, low friction coefficient, but the raw material of PTFE surface activity, bonding between metal and its end is very difficult, using plasma bombardment need adhesive of PTFE surface, the surface activity enhanced obviously, and metal bonding between solid and reliable, and meet the requirements of the process, and the other side to keep the original performance, its application is becoming more and more widely.
13. Other applications of Plasma Cleaning in the automotive industry
With the development of economy, consumers have higher and higher requirements on the performance of automobiles, such as the appearance, comfort, reliability and durability of automobiles.In order to meet the requirements of consumers, automobile manufacturers pay more attention to the details of the optimization of the well in the production of cars, such as the panel in the flexible polyurethane (PU) coating pretreatment, control panel in the adhesive pretreatment, internal PP parts embedded in the pretreatment, automotive doors and Windows seals, etc..
14. Plasma Cleaning for Mobile phone shell
Plasma surface treatment technology not only can clean the shell when injection oil, more can activate the surface of the plastic shell to a great extent, enhance the bonding effect such as printing, coating, coating on shell with very strong connection between the body, the coating effect is very uniform, external appearance more beautiful, and greatly enhance the abrasion resistance, use for a long time also won't appear grinding paint phenomenon.
15. Applications of Plasma Cleaner in the medical industry
Treatment of urethral catheters
Treatment of petri dishes
Treatment of enzyme label plate
In addition, plasma treatment of silicone rubber can be used to increase its surface activity, and then coated on the surface of a layer of non-aging hydrophobic material, the effect is also very good.
16. Plasma Treatment In the textile fiber industry
The superior performance of nonwoven fabric makes it widely used in medical and health care, home decoration, clothing, industry and agriculture.According to different needs, non-woven fabrics in the production process to be in the surface of composite treatment, and non-woven fabrics and various materials (plastic, plastic film, textile, etc.) bonding, in order to achieve a very good printing, bonding and other effects, it is necessary to non-woven body surface treatment.Plasma drum cleaning machine is specially used for non-woven cable and other slender surface treatment, the machine processing effect is good, high efficiency, suitable for mass production and processing.
17. Electrical connectors of Plasma Surface Treatment for aerospace
The bonding effect between insulator and wire sealing body in electrical connector has been influencing the development of electrical connector.The adhesion effect is very poor without surface treatment. Plasma cleaning can not only remove oil stains on the surface, but also enhance its surface activity. In this way, it is very easy and uniform to apply glue to the connecting parts during adhesion, so that the adhesion effect can be significantly improved.After the test of many large domestic production plants, the tensile strength of the electrical connectors after plasma treatment has increased exponentially, and the pressurization value has been significantly improved.
18. Plasma Surface Treatment for Kevlar handles
Kevlar material is a kind of aramid fiber composite material, this new material has low density, high strength, good toughness, high temperature resistance, easy to process and shape.Kevlar needs to be bonded with other parts after forming, but this material is hydrophobic material, which is not easy to be coated with glue. In order to obtain good bonding effect, surface treatment is required.At present, plasma is mainly used for surface activation treatment.The surface activity of treated kevlar was enhanced and the bonding effect was obviously improved.
19. Plasma Cleaning for Speakers and headphones: quality directly affect the quality and grade of mobile phones, so the high-end phones speaker requirement for quality is very high, the speaker of the small part is the key, related to the bonding and encapsulation is essential, after plasma treatment, to make the package and glue firmer, perfect quality at the same time, improve the performance of resistance to fall.
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